▎ 摘　　要

NOVELTY - Method of forming nano crystalline graphene, involves arranging substrate having pattern in reaction chamber; injecting reaction gas into reaction chamber, reaction gas including carbon source gas, inert gas, and hydrogen gas that are mixed; generating plasma of the reaction gas in reaction chamber; and directly growing nano crystalline graphene on surface of pattern using plasma of reaction gas at a process temperature, where pattern comprises first material and substrate comprises second material different from first material. USE - Method of forming nano crystalline graphene. ADVANTAGE - The pattern may include a first material and the substrate may include a second material different from the first material. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of an interconnect structure. 10capping layer 20dielectric layer 30conductive wiring