▎ 摘 要
NOVELTY - A graphene manufacturing device has a vacuum chamber provided with vacuum in an inner side, and a heating part installed in top of the vacuum chamber for heating the vacuum in the inner side of the vacuum chamber. A cooling part is installed at bottom of the vacuum chamber for circulating refrigerant. A substrate lifting unit is equipped for ascending and descending a substrate. A gas supply part supplies carbon source and purging gas to the vacuum chamber. USE - Graphene manufacturing device for forming a graphene thin film on a substrate i.e. silicon wafer. ADVANTAGE - The device forms graphene thin film through simple process, and facilitates mass-production of excellent graphene thin film at different processing conditions. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for manufacturing graphene. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a graphene manufacturing device.