▎ 摘　　要

NOVELTY - A fine-grinding pad comprises 90-100 pts. wt. polyurethane prepolymer, 8-14 pts. wt. diluent, 6-14 pts. wt. chain extender, 3-5 pts. wt. foaming agent, 20-40 pts. wt. grinding material and 1-5 pts. wt. filler, where the fine grinding pad is prepared by mixing and stirring polyurethane prepolymer with diluted agent for 1-5 min, adding filler, continuously stirring for 1-5 min, adding foaming agent foam, after foaming, adding chain extender to obtain slurry, pouring the slurry into the mold, preheating at 80℃, curing for 8h at 120℃ to obtain crude product, dispersing the abrasive in sodium hydroxide solution to form dispersion, putting the crude product into dispersion for dipping, taking out crude product, washing and drying to obtain the finished product. USE - Fine polishing pad for an inner wall of a new energy automobile cylinder in chemical mechanical planarization (CMP) process. ADVANTAGE - The modified graphene oxide has good hydrophilic performance and dispersing performance, it can form excellent dispersion in the polyurethane prepolymer system. By using 1-methyl imidazole chloride modified graphene oxides as filler, the alpha-aluminum oxide/metatitanic acid core-shell material is the low surface roughness and high material removing rate of the grinding material obtain. The fine polishing pad is not balanced in porosity and mechanical property and easy damage surface of material when the material is polished.