• 专利标题:   Selective growth and pattering of graphene by depositing fine-grained metal or alloy on oxidized silicon substrate, annealing the metal to change the structure of the metal to amorphous, mixed and/or single texture, performing hydrocarbon dissolution, growing and releasing graphene layer.
  • 专利号:   US2021226014-A1, US11456358-B2
  • 发明人:   ZAKAR E S
  • 专利权人:   US ARMY COMBAT CAPABILITIES DEV COMMAND, US SEC ARMY
  • 国际专利分类:   H01L021/02, C01B032/186, H01L029/16
  • 专利详细信息:   US2021226014-A1 22 Jul 2021 H01L-029/16 202185 English
  • 申请详细信息:   US2021226014-A1 US748364 21 Jan 2020
  • 优先权号:   US748364

▎ 摘  要

NOVELTY - Selective growth and pattering of graphene comprises: depositing a fine-grained metal or alloy on an oxidized silicon substrate; annealing the metal during deposition to change the structure of the metal to amorphous, mixed texture and/or single texture; performing hydrocarbon dissolution by introducing a carbon precursor gas into the atmosphere pressure chemical vapor deposition furnace; growing a graphene layer by cooling the furnace at a defined rate while maintaining existing atmospheric composition, where graphene grows only upon metal having mixed or single texture and does not grow on metal having an amorphous texture; and releasing a graphene layer from the metal. The carbon precursor gas is methane, ethyne or ethylene. The metal is nickel or an alloy of nickel. USE - The method is useful for selective growth and pattering of graphene, which is useful for forming patterned graphene film. ADVANTAGE - The method: controls patterning of graphene without a mask; and provides maskless, patterned graphene film through use of a tunable metal as a catalyst for graphene growth. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a patterned graphene film.