• 专利标题:   Carrier substrate for transferring transfer layer from carrier substrate to product substrate, comprises carrier base substrate, protective layer, and transfer layer grown on protective layer.
  • 专利号:   WO2021213625-A1, TW202232666-A, CN115298028-A, KR2023007321-A, EP4139129-A1
  • 发明人:   BURGGRAF J, JUERGEN B
  • 专利权人:   EV GROUP THALLNER GMBH E, EV GROUP THALLNER GMBH E
  • 国际专利分类:   B32B037/00, H01L021/673, H01L021/77, C01B032/184, C23C014/00, C23C014/02, C23C014/06, C23C016/01, C23C016/02, C23C016/26
  • 专利详细信息:   WO2021213625-A1 28 Oct 2021 B32B-037/00 202191 Pages: 55 German
  • 申请详细信息:   WO2021213625-A1 WOEP061027 20 Apr 2020
  • 优先权号:   CN80099589, EP720808, WOEP061027, KR733813, CN80099589

▎ 摘  要

NOVELTY - The carrier substrate (1) comprises a carrier base substrate (3), a protective layer (5) and the transfer layer (6). The transfer layer is grown on the protective layer. The transfer layer is a graphene layer. The transfer layer having a release layer (4) is arranged between the carrier base substrate and the protective layer. The protective layer is a monocrystalline metal layer, made of nickel. USE - Carrier substrate for transferring transfer layer from carrier substrate to product substrate e.g. wafer, in semiconductor industry. ADVANTAGE - The carrier substrate has improved carrier substrate and carrier substrate manufacturing method and method for transferring transfer layer from carrier substrate to product substrate. The graphene layers or other sensitive layers to be transferred cost-efficiently, quickly, over large area and free of defects. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) a method for producing carrier substrate for transferring transfer layer from the carrier substrate to product substrate; and (2) the method for transferring transfer layer from carrier substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the carrier substrate with layer system. Carrier substrate (1) Carrier base substrate (3) Release layer (4) Protective layer (5) Transfer layer (6)