• 专利标题:   Graphene field effect transistor preparing method, involves providing semiconductor substrate surface with graphene surface, providing spin with organic or inorganic metal protection layer, and providing metal electrode with optical image.
  • 专利号:   CN104465400-A, CN104465400-B
  • 发明人:   JIN Z, PENG S, WANG X, ZHANG D, WANG S, SHI J
  • 专利权人:   INST MICROELECTRONICS CHINESE ACAD SCI, INST MICROELECTRONICS CHINESE ACAD SCI
  • 国际专利分类:   H01L021/027, H01L021/336, H01L021/66
  • 专利详细信息:   CN104465400-A 25 Mar 2015 H01L-021/336 201534 Pages: 13 Chinese
  • 申请详细信息:   CN104465400-A CN10763616 11 Dec 2014
  • 优先权号:   CN10763616

▎ 摘  要

NOVELTY - The method involves providing a semiconductor substrate surface with a graphene surface. A spin is provided with an organic metal protection layer or inorganic metal protection layer. A metal electrode is provided with an optical image. A graphene metal contact area is provided with the protection layer. A source/drain electrode is provided with a graphene field effect transistor. The source/drain electrode is made of titanium or gold. USE - Graphene field effect transistor preparing method. ADVANTAGE - The method enables improving graphene carrier migration rate. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a graphene field effect transistor preparing method. '(Drawing includes non-English language text)'