• 专利标题:   AlGaN-based graphene insertion layer ultraviolet detector, has substrate, AlN layer, AlxGal-xN layer, graphene layer, AlyGa1-yNlayer connected from up to down, two contact electrodes and AlN layer connected to Al polar face.
  • 专利号:   CN111370509-A, CN111370509-B
  • 发明人:   LI D, JIANG K, SUN F, SUN X, JIA Y, CHEN Y, SHI Z, ZANG X
  • 专利权人:   CHANGCHUN INST OPTICS FINE MECHANICS P
  • 国际专利分类:   H01L031/0336, H01L031/101, H01L031/18
  • 专利详细信息:   CN111370509-A 03 Jul 2020 H01L-031/0336 202064 Pages: 7 Chinese
  • 申请详细信息:   CN111370509-A CN10171621 12 Mar 2020
  • 优先权号:   CN10171621

▎ 摘  要

NOVELTY - The detector has a substrate, an AlN layer, a AlxGal-xN layer, a graphene layer, AlyGa1-yNlayer orderly connected from up to down. Two contact electrodes and the AlN layer are connected to an Al polar face for providing compressive stress, where a thickness of the AlxGal-xN layer is 500-1000nm, a thickness of the AlyGa1-yN layer is 10-50nm. USE - AlGaN-based graphene insertion layer ultraviolet detector. ADVANTAGE - The detector has better dislocation inhibition and a response level and response speed, improves a quality of an epitaxial layer, the graphene layer to improve carrier drift rate, an AlGaN heterostructure region inserted in a high mobility graphene material so as to obviously improve a carrier drift rate, has simple manufacturing process and wide application prospect. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a AlGaN-based graphene insertion layer ultraviolet detector manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of an AlGaN-based graphene insertion layer ultraviolet detector.