• 专利标题:   Graphene structure for e.g. static RAM, has silicon substrate whose surface is arranged with graphene, where material of substrate and carbon of graphene are covalently bonded and arranged between substrate surface and graphene.
  • 专利号:   US2020350164-A1, KR2020126721-A
  • 发明人:   LEE E, BYUN K, SONG H, SHIN H, KIM C, SHIN K, LEE C, JUNG A, BYUN K E, SONG H J, SHIN H J, SHIN K W, LEE C S, JUNG A R
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L021/02, H01L029/16, H01L029/165, H01L021/306, H01L021/3065, H01L021/324, H01L029/66
  • 专利详细信息:   US2020350164-A1 05 Nov 2020 H01L-021/02 202091 Pages: 24 English
  • 申请详细信息:   US2020350164-A1 US678115 08 Nov 2019
  • 优先权号:   KR050720

▎ 摘  要

NOVELTY - The structure has a silicon substrate (110) whose surface is arranged with a graphene and includes nano-sized roughness, where thickness of the graphene is 1-2 nm and a material of the substrate and carbon of the graphene are covalently bonded and arranged between the surface of the substrate and the graphene. A bonding region covers a portion of the surface of the substrate and includes a silicon-carbon bond. USE - Graphene structure for a semiconductor device i.e. memory e.g. nonvolatile memory and volatile memory such as static RAM (SRAM), dynamic RAM (DRAM), and synchronous DRAM (SDRAM). Uses include but are not limited to a flash memory, a phase-change RAM (PRAM), a magneto-resistive RAM (MRAM), a resistive RAM (ReRAM), and a ferro-electric RAM (FRAM). ADVANTAGE - The structure has high electric mobility, excellent thermal characteristics, chemical stability and wide surface area. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for forming a graphene structure. DESCRIPTION OF DRAWING(S) - The drawing shows a side view of a graphene structure. Silicon substrate (110)