• 专利标题:   Formation method of horizontal graphene PIN junction used in semiconductor device, involves removing corrosion transferring graphene on shielding layer and shielding layer, and obtaining horizontal graphene PIN junction.
  • 专利号:   CN103280397-A, CN103280397-B
  • 发明人:   WANG J, LI J, LIU Q, WEI C, FENG Z, HE Z
  • 专利权人:   CHINA ELECTRONICS TECHNOLOGY GROUP CORP
  • 国际专利分类:   H01L021/04
  • 专利详细信息:   CN103280397-A 04 Sep 2013 H01L-021/04 201377 Pages: 7 Chinese
  • 申请详细信息:   CN103280397-A CN10208416 30 May 2013
  • 优先权号:   CN10208416

▎ 摘  要

NOVELTY - The formation method involves preparing a bottom layer of a graphene on a substrate. An area in which bottom layer graphene is needed is reserved and other areas are removed by oxygen plasma etching. A shielding layer is deposited as the bottom layer of one graphene doped type region. The other graphene doped type is transferred to a surface of a sample after photo-etching. A corrosion transferring graphene on the shielding layer and the shielding layer are removed, and horizontal graphene PIN junction is obtained. USE - Formation method of horizontal graphene PIN junction used in semiconductor device such as composite photo-electric detector, as well as used in thin film crystal growth field. ADVANTAGE - The horizontal graphene PIN junction can be formed by the simple process and is formed with improved performance. DESCRIPTION OF DRAWING(S) - The drawing shows the sectional views of the PIN junction during formation process. (Drawing includes non-English language text)