▎ 摘　　要

NOVELTY - The graphene inspection apparatus has data acquisition unit that acquires heat distribution data of the graphene in which the current is applied. The detection unit detects the deformity occurrence of the graphene based on heat distribution data. USE - Graphene inspection apparatus. ADVANTAGE - The efficiency of the apparatus is improved, and the graphene quality is improved. DESCRIPTION OF DRAWING(S) - The drawing shows a block diagram of the graphene inspection apparatus. (Drawing includes non-English language text)