▎ 摘　　要

NOVELTY - A multilayer single-crystal silicon nano-film/graphene photodetector comprises a substrate, two bottom metal interconnecting wires, a single crystal silicon nano-film, graphene, and two top metal interconnecting wires. One of bottom metal interconnecting wires and one of top metal interconnecting wires are in contact with the single crystal silicon nano-film to form several contact electrodes. Other of bottom metal interconnecting wires and top metal interconnecting wires form two other contact electrodes with graphene. The single-crystal silicon nano-film and graphene are alternately stacked to form a multilayer single-crystal silicon nano-film and multilayer graphene in which each single-crystal silicon nano-film has an overlapping area with graphene on its upper and lower surfaces forming a single-crystal silicon/graphene Schottky heterojunction. The signals generated at the Schottky heterojunction are led out through the bottom and top metal interconnecting wires. USE - Multilayer single-crystal silicon nano-film/graphene photodetector. ADVANTAGE - The multilayer single-crystal silicon nano-film/graphene photodetector has excellent detection performance and flexibility. The multilayer structure of the photodetector increases contact area between graphene and single-crystal silicon nano-film in the same area, increases thickness, improves device's ability to absorb long-wavelength light, and improves device's response to long-wavelength light. The single-crystal silicon nano-film has a porous structure which reduces the light reflection of nano-film and improves light absorption of the device. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for preparation of multilayer single-crystal silicon nano-film/graphene photodetector.