• 专利标题:   Method for manufacturing doped graphite alkene, involves processing graphite, processing graphene by ion implantation, plasma bombardment and/or etching processes, and performing annealing treatment to processed graphene with doping element.
  • 专利号:   CN102486993-A, CN102486993-B
  • 发明人:   GUO B, GONG J
  • 专利权人:   NAT CENT NANOSCIENCE TECHNOLOGY CHINA, NAT CENT NANOSCIENCE TECHNOLOGY CHINA
  • 国际专利分类:   H01L021/02
  • 专利详细信息:   CN102486993-A 06 Jun 2012 H01L-021/02 201246 Pages: 8 Chinese
  • 申请详细信息:   CN102486993-A CN10577424 02 Dec 2010
  • 优先权号:   CN10577424

▎ 摘  要

NOVELTY - The method involves processing graphite, and processing graphene by ion implantation, plasma bombardment and/or etching processes. Annealing treatment is performed to the processed graphene with doping element, where the doping element is selected from nitrogen, phosphorus and boron. The ion implantation is realized by injecting ions under the graphene in vacuum condition with vacuum degree of not less than 10-4 Mpa. The plasma bombardment and/or etching are performed by conducting plasma radiation on the graphene in vacuum condition with vacuum degree of not less than 10-4 Mpa. USE - Method for manufacturing a doped graphite alkene that is utilized in a semiconductor material (claimed). ADVANTAGE - The method enables controlling electrical property of graphite alkene, and enables realizing simple and reliable process and large scale industrial production. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic Illustration of a method for manufacturing a doped graphite alkene.