• 专利标题:   Graphene plasmon gas sensor, has graphene layer whose two ends are respectively fixed on two metal electrodes, continuous longitudinal section formed as step-shape structure, and cover plate placed on graphene vibration element.
  • 专利号:   CN108593585-A
  • 发明人:   DAI Q, YANG X, HU H, GUO X, HU D
  • 专利权人:   NAT CENT NANOSCIENCE TECHNOLOGY CHINA
  • 国际专利分类:   G01N021/3504
  • 专利详细信息:   CN108593585-A 28 Sep 2018 G01N-021/3504 201871 Pages: 15 Chinese
  • 申请详细信息:   CN108593585-A CN10644987 21 Jun 2018
  • 优先权号:   CN10644987

▎ 摘  要

NOVELTY - The sensor has a cover plate connected with an excitation element i.e. graphene. Two ends of a graphene layer are respectively fixed on two metal electrodes. A micro cavity is formed between the cover plate and a sample feeding channel. The graphene layer is formed as a periodic nanometer structure, where the periodic nanometer structure comprises a continuous longitudinal section. The continuous longitudinal section is formed as a step-shape structure. The cover plate is placed on a graphene vibration element. The cover plate is made of material selected from a group consisting of silicon, magnesium fluoride, calcium di-fluoride, barium fluoride, aluminum oxide and silicon nitride. A dielectric layer is made of material selected from silicon dioxide, magnesium fluoride, aluminum oxide, calcium di-fluoride, barium fluoride, Lithium fluoride, Silver bromide, silver chloride, zinc sulfide, zinc selenide, thallium bromide and hexamethylenediamine adipate. USE - Graphene plasmon gas sensor. ADVANTAGE - The sensor can realize interaction of graphene plasmon with gas molecules to obtain plasmon-enhanced gas infrared spectrum so as to realize lanosta gas species. The sensor can detect small amount of gas molecules when plasmon wavelength is in infrared band with resonant frequency of about 400-3000 wave numbers so as to realize reuse of sensors. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphene plasmon gas sensor manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a front view of a graphene plasmon gas sensor.