• 专利标题:   Field emission cathode based on graphene/metamaterial composite nanostructures used in the field of high brightness and coherent electron sources comprises e.g. base material on patterned vertical carbon nanotube array and graphene material.
  • 专利号:   CN111180292-A
  • 发明人:   XU J, SHI Y, ZHANG X
  • 专利权人:   UNIV SOUTHEAST
  • 国际专利分类:   B82Y040/00, C01B032/16, C01B032/182, H01J001/304, H01J009/02
  • 专利详细信息:   CN111180292-A 19 May 2020 H01J-001/304 202046 Pages: 9 Chinese
  • 申请详细信息:   CN111180292-A CN10030369 13 Jan 2020
  • 优先权号:   CN10030369

▎ 摘  要

NOVELTY - Field emission cathode based on graphene/metamaterial composite nanostructures comprises a base material on which a patterned vertical carbon nanotube array or a patterned microtip array and a graphene material compounded with it are arranged. USE - The cathode is useful in the field of high brightness and coherent electron sources. ADVANTAGE - The cathode has small size, fast response, large current density, environmental tolerance and compatibility with micromachining technology. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for preparing a field emission cathode based on a graphene/metamaterial composite nanostructure comprising (a) spin-coating and pattern the photoresist on the base material, (b) sputtering the catalytic layer and removing excess photoresist to obtain a patterned catalytic layer structure, (c) performing wet transfer of graphene to the patterned catalytic layer and (d) growing vertical carbon nanotubes on the patterned catalytic layer structure, when the patterned vertical carbon nanotube array is arranged on the base material.