• 专利标题:   Manufacture of field effect transistor involves arranging pattern-forming fixture on substrate on which graphene is formed, generating evaporation-induced self assembly, forming graphene patterns, dielectric layer and gate electrode.
  • 专利号:   KR1348169-B1
  • 发明人:   YANG W S, KIM H K, KIM T Y, KWON S W, KIM Y N, PARK W K, JANG A R, SHIN H S, YOON D H, SUH K S
  • 专利权人:   INTELLECTUAL DISCOVERY CO LTD
  • 国际专利分类:   H01L021/336, H01L029/78
  • 专利详细信息:   KR1348169-B1 16 Jan 2014 H01L-021/336 201417 Pages: 20
  • 申请详细信息:   KR1348169-B1 KR074437 09 Jul 2012
  • 优先权号:   KR074437

▎ 摘  要

NOVELTY - Manufacture of field effect transistor using graphene involves forming graphene on substrate, arranging pattern-forming fixture on substrate on which graphene is formed, supplying solution (S1), generating evaporation-induced self assembly, such that pattern is formed, transferring graphene onto primary solute to form primary graphene pattern, intersecting primary graphene pattern to form secondary graphene pattern, forming dielectric layer on secondary graphene pattern, and forming gate electrode on the dielectric layer. USE - Manufacture of field effect transistor (claimed). ADVANTAGE - The field effect transistor is economically manufactured by simple method.