• 专利标题:   Flexible photodetector based on single crystal silicon nano-film/graphene, comprises a flexible substrate, two metal interconnecting wires, a single crystal silicon nano-film, graphene and a top flexible packaging layer.
  • 专利号:   CN111180540-A
  • 发明人:   LV C, LU M, XU Y, MAO R, LIU L
  • 专利权人:   UNIV ZHEJIANG
  • 国际专利分类:   B82Y030/00, B82Y040/00, H01L031/028, H01L031/0352, H01L031/0392, H01L031/108, H01L031/18
  • 专利详细信息:   CN111180540-A 19 May 2020 H01L-031/0392 202049 Pages: 9 Chinese
  • 申请详细信息:   CN111180540-A CN11405518 30 Dec 2019
  • 优先权号:   CN11405518

▎ 摘  要

NOVELTY - The flexible photodetector based on single crystal silicon nano-film or graphene, comprises a flexible substrate, two metal interconnecting wires, a single crystal silicon nano-film, graphene and a top flexible packaging layer. One metal interconnection wire and single crystal silicon nano-film forms a metal contact electrode. The other metal interconnection wire and graphene forms another metal contact electrode. The nano-film and graphene has an overlapping area to form a single crystal silicon or graphene Schottky heterojunction. The top flexible encapsulation layer at the end is etched away, exposing the metal interconnection wires, and connecting the signal to the external circuit. USE - Flexible photodetector based on single crystal silicon nano-film/graphene. ADVANTAGE - It has the advantages of ultra-thin and flexible, combined with polyimide. The high insulation and good biocompatibility have greatly expanded the application field of silicon or graphene heterojunction photodetectors, especially in the field of biomedicine and wearable electronic devices. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for preparing a flexible photodetector. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a flexible photodetector based on single crystal silicon nano-film/graphene. (Drawing includes non-English language text).