• 专利标题:   Preparing a pressure sensor comprises stirring main agent and auxiliary of polydimethylsiloxane, dispersing resulting mixture and using laser to perform photolithography, and placing two graphene conductive patterns in face-to-face contact.
  • 专利号:   CN110907087-A
  • 发明人:   ZHU Y, PAN N, WANG X
  • 专利权人:   UNIV CHINA SCI TECHNOLOGY
  • 国际专利分类:   G01L009/04
  • 专利详细信息:   CN110907087-A 24 Mar 2020 G01L-009/04 202031 Pages: 11 Chinese
  • 申请详细信息:   CN110907087-A CN11087878 18 Sep 2018
  • 优先权号:   CN11087878

▎ 摘  要

NOVELTY - Preparing a pressure sensor comprises stirring a main agent and auxiliary of a polydimethylsiloxane (PDMS) in a mass ratio of 10:1, dispersing a resulting mixture uniformly on a substrate and curing to obtain a polydimethylsiloxane film, and using a laser to perform photolithography on the polydimethylsiloxane film to form a graphene conductive pattern, placing two graphene conductive patterns in face-to-face contact to obtain a pressure sensor, where the graphene conductive pattern is a cube or a rectangular parallelepiped, where a surface-to-surface contact area equal to a length of the graphene conductive pattern into a width of the graphene conductive pattern, where a wavelength of the laser is 405nm and a power of the laser is 100-800mW and area of the face-to-face contact is 4 to 36 mm2. USE - The method is useful for preparing a pressure sensor. ADVANTAGE - The method: comprises conductive channel forming an edge protrusion, which is shaped e.g. a middle groove and a triangular prism on both sides becomes flattened under pressure thus make the contact area larger; reduces contact resistance; ensures that the pressure sensor has a high sensitivity in a small pressure range; has simple preparation process; and ensures that the pressure sensor can be attached to the skin and used in the field of electronic skin. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a pressure sensor.