• 专利标题:   Preparation method of easy-to-exfoliate near-free state graphene useful in the field of semiconductor electronic devices and energy conversion, involves pretreating metal substrates, placing substrate in quartz assembly, placing buffer material between quartz assembly and metal substrate.
  • 专利号:   CN116022777-A
  • 发明人:   ZHAO X, YU F, CHENG X, LI Y, GUO X, ZHANG X, WANG P, SUN L
  • 专利权人:   UNIV SHANDONG
  • 国际专利分类:   C01B032/186, C01B032/194
  • 专利详细信息:   CN116022777-A 28 Apr 2023 C01B-032/186 202343 Chinese
  • 申请详细信息:   CN116022777-A CN10071729 16 Jan 2023
  • 优先权号:   CN10071729

▎ 摘  要

NOVELTY - The preparation method of easy-to-exfoliate near-free state graphene, involves: (S1) pretreating metal substrates; (S2) placing the metal substrate in the quartz assembly, placing a buffer material between the quartz assembly and the metal substrate, and placing it in a reaction furnace, and using an inert gas to clean and vacuum the furnace chamber; (S3) introducing a carrier gas into the furnace chamber, adjusting the furnace chamber to the target pressure, increasing it to the target temperature, and performing high-temperature annealing on the substrate to obtain a metal substrate with a specific crystal plane; (S4) increasing the temperature to the temperature required for graphene growth, and feeding the reaction gas to carry out graphene nucleation and lateral growth; (S5) cooling down to room temperature, after the growth is completed, to obtain graphene; and (S6) carrying out post-treatment of graphene, introducing post-processing gas into the reaction chamber. USE - Preparation method of easy-to-exfoliate near-free state graphene useful in the field of semiconductor electronic devices and energy conversion (claimed) ADVANTAGE - By designing and adjusting the growth process and post-treatment process, the method significantly reduces the interaction between graphene and the substrate without introducing other impurities, and directly prepares easy-to-exfoliate near-free state graphene. DETAILED DESCRIPTION - The preparation method of easy-to-exfoliate near-free state graphene, involves: (S1) pretreating metal substrates; (S2) placing the metal substrate in the quartz assembly, placing a buffer material between the quartz assembly and the metal substrate, and placing it in a reaction furnace, and using an inert gas to clean and vacuum the furnace chamber; (S3) introducing a carrier gas into the furnace chamber, adjusting the furnace chamber to the target pressure, increasing it to the target temperature, and performing high-temperature annealing on the substrate to obtain a metal substrate with a specific crystal plane; (S4) increasing the temperature to the temperature required for graphene growth, and feeding the reaction gas to carry out graphene nucleation and lateral growth; (S5) cooling down to room temperature, after the growth is completed, to obtain graphene; and (S6) carrying out post-treatment of graphene, introducing post-processing gas into the reaction chamber, adjusting the pressure and temperature of the furnace chamber, preferentially reacting the highly active metal substrate, and passivating the interface to form a stable compound, thus eliminating the interaction between graphene and the metal substrate. An INDEPENDENT CLAIM is included for the easy-to-exfoliate near-free-state graphene.