▎ 摘　　要

NOVELTY - Graphene-based standard leak hole comprises a gas source chamber, a pressure side metal knife edge flange, a helium permeation component, and a vacuum side metal knife edge flange. The helium permeating component comprises a permeating part and a fixed part, and the pressure side metal knife edge flange and the vacuum side metal knife edge flange are located on both sides of the helium permeating component, and are sealed to the fixed part. The communication part is sealed by a pressure side metal knife edge flange. The connection is sealed by a metal knife-edge flange on the vacuum side. The permeating part of the helium permeating component is sequentially comprises pressure-side quartz glass, copper foil, graphene film, and vacuum-side quartz glass that are perpendicular to the fixed part. The graphene film is porous graphene or defective graphene. The pressure side of the copper foil is laminated with graphene film, and the vacuum side has through holes formed by chemical etching. USE - Used as graphene-based standard leak hole. ADVANTAGE - The hole: eliminates the gas leakage of the leak hole and improves the stability of the leakage rate, where the leak rate reaches 1014 Pa.m3/s; and improves the calibration accuracy and precision of mass spectrometry leak detection. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for preparing the graphene-based standard leak hole. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the graphene-based standard leak hole.