• 专利标题:   Board for forming graphene layer, comprises board layer; metal catalyst layer disposed on the board layer and functioning as a catalyst for forming the graphene layer; and stress reduction layer to reduce stress of the metal catalyst layer.
  • 专利号:   US2014295080-A1, KR2014117721-A, KR1475266-B1, US9428829-B2
  • 发明人:   CHO B J, MUN J H
  • 专利权人:   KOREA ADVANCED INST SCI TECHNOLOGY, KOREA ADVANCED INST SCI TECHNOLOGY
  • 国际专利分类:   C23C016/26, C01B031/02, C23C016/06, H01B005/14, C01B031/04, C23C014/02, C23C016/40
  • 专利详细信息:   US2014295080-A1 02 Oct 2014 C23C-016/26 201470 Pages: 12 English
  • 申请详细信息:   US2014295080-A1 US132121 18 Dec 2013
  • 优先权号:   KR031902

▎ 摘  要

NOVELTY - A board (100) for forming a graphene layer, comprises a board layer (110); a metal catalyst layer (130) disposed on the board layer and functioning as a catalyst for forming the graphene layer; and a stress reduction layer (120) disposed between the board layer and the metal catalyst layer to reduce stress of the metal catalyst layer. USE - As board (100) for forming a graphene layer (claimed). ADVANTAGE - The board having crystallinity and surface roughness suitable for growing a high-quality graphene layer to suppress grain growth from occurring in the course of annealing and induce efficient crystallization. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for forming a graphene layer, involving forming a board layer; forming a stress reduction layer on the board layer; forming a metal catalyst layer which functions as a catalyst for forming the graphene layer; and growing the graphene layer on the metal catalyst layer, where the stress reduction layer reduces stress of the metal catalyst layer. DESCRIPTION OF DRAWING(S) - The figure shows view of board for forming a graphene layer. Board (100) Board layer (110) Substrate layer (112) Stress reduction layer (120) Metal catalyst layer (130)