• 专利标题:   Through-hole epitaxy method for manufacturing light emitting device, involves forming amorphous insulating layer with nano-sized first through hole on growth substrate, where semiconductor layer is transferred to target substrate using support.
  • 专利号:   KR2023068123-A, KR2538943-B1
  • 发明人:   KIM J G, CHOI J, KWON Y G, JANG D, LEE Y, AHN C, LEE S J, LEE H, KIM D
  • 专利权人:   UNIV KYUNGHEE IND COOP
  • 国际专利分类:   H01L033/00, H01L033/16, H01L033/32
  • 专利详细信息:   KR2023068123-A 17 May 2023 H01L-033/00 202346 Pages: 20
  • 申请详细信息:   KR2023068123-A KR154125 10 Nov 2021
  • 优先权号:   KR154125

▎ 摘  要

NOVELTY - Through-hole epitaxy method involves forming an amorphous insulating layer (120) comprising a nano-sized a through-hole (H1) on a growth substrate (111), forming at least two two-dimensional material layers (130) on the amorphous insulating layer, epitaxially growing at least one semiconductor layer on the two-dimensional material layer, and transferring the semiconductor layer to a target substrate using a support. The two-dimensional material layer of the at least two layers comprises a nano-sized through hole (H2). USE - Through-hole epitaxy method used for manufacturing light emitting device (claimed). ADVANTAGE - The semiconductor layer is epitaxially grown on the growth substrate without limiting the number of layers of the two-dimensional material layer using the 2D material layer including the nano-sized second through-hole. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for manufacture of light emitting device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view illustrating the through-hole epitaxial method. 111Growth substrate 120,121Amorphous insulating layer 130,132,133Two-dimensional material layer