• 专利标题:   Chemical gas phase deposition transferring graphene thin film tooling device, has bottom plate provided with fixed column, lower clamp and upper clamp, where lower clamp is fixed with square block, and location hole formed on fixed column.
  • 专利号:   CN104388934-A, CN104388934-B
  • 发明人:   SHAO L, SHI H, YU J, ZHANG P, ZHONG D
  • 专利权人:   CHONGQING MOXI TECHNOLOGY CO LTD, CHINESE ACAD SCI CHONGQING GREEN INTEL, CHONGQING GRAPHENE TECH CO LTD, CHINESE ACAD SCI CHONGQING GREEN INTEL
  • 国际专利分类:   C23F001/08
  • 专利详细信息:   CN104388934-A 04 Mar 2015 C23F-001/08 201531 Pages: 8 Chinese
  • 申请详细信息:   CN104388934-A CN10754782 11 Dec 2014
  • 优先权号:   CN10754782

▎ 摘  要

NOVELTY - The device has a bottom plate (1) provided with a fixed column (2), a lower clamp and an upper clamp. A location hole is formed on the lower clamp that is fixed with a square block. An etching liquid flow unit etches a catalytic substrate. The upper clamp is provided with the square block according to length width size of the square block. The location hole is formed on the fixed column. The lower clamp and the upper clamp are provided with the bottom plate. Diameter of the fixing column is 0.1-3cm. The lower clamp and the upper clamp are made of acid and alkali resistant corrosion rubber. USE - Chemical gas phase deposition transferring graphene thin film tooling device. ADVANTAGE - The device has better catalytic base etching effect of the graphene thin film, high production efficiency, simple structure and easy manufacturing process. DESCRIPTION OF DRAWING(S) - The drawing shows a side perspective view of a chemical gas phase deposition transferring graphene thin film tooling device. Bottom plate (1) Fixed column (2)