▎ 摘　　要

NOVELTY - The sensor is a MEMS resonator has an electrode that is divided into a first electrode (1), the second electrode (2) and the third electrode (3), where a graphene is single-layer graphene (4) and multi-layer graphene (5). A substrate is divided into a silicon dioxide substrate (8) and a silicon substrate (9) with a middle cavity. The third electrode is clamped on the bottom of the cavity of the silicon dioxide substrate, and placed on the silicon substrate. The second insulating layer (7) is set on the multi-layer graphene. A fixed lower shell is provided with three through holes used for the first electrode, the second electrode, the third electrode connected and communicated with the external integrated circuit. The two-dimensional inorganic non-metallic material can be epoxy resin, phenolic resin, glass or ceramic material. USE - Resonant type graphene gas pressure sensor used for respiratory detection, air pressure measurement, weather prediction altitude sensing, flow measurement, and leakage measurement. Can also be used in intelligent wearable device, smart watch, smart phone, tablet personal computer (PC), mobile phone, personal digital assistant (PDA), portable multimedia player (PMP), digital camera, digital video camera (DVC), digital video camcorder (DVCC), digital photo frame (DPS), portable game machine, portable music player, portable game console, portable navigation device, and portable medical device. ADVANTAGE - The resonance type graphene gas pressure sensor ensures higher measuring precision because of the graphene flexibility. The fixed upper shell is covered on the second insulating layer, where the fixed lower shell forms a box, thus improving the stability and durability of the gas pressure sensor. THe reduced influence of external temperature on the single layer graphite can improve the precision of the gas pressure graphene. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of Resonant type graphene gas pressure sensor First electrode (1) Second electrode (2) Third electrode (3) Single-layer graphene (4) Multi-layer graphene (5) Graphene insulating layer (6) Second insulating layer (7) Silicon dioxide substrate (8) Silicon substrate (9) Fixed upper shell (10) First cavity (11) Compression lower second cavity (12) Fixed lower shell (14)