• 专利标题:   Graphene thin film preparation device includes working cavity, carbon source entrance, residual gas inner exit, substrate, screening electric field pole plate, screening electric field electrode and accelerating electric field pole plate.
  • 专利号:   CN203639159-U
  • 发明人:   MA Y, NIU S, TATACHENKO V, YAN S, ZONG Z
  • 专利权人:   SHANGHAI CEC ZHENHUA CRYSTAL TECHNOLOGY
  • 国际专利分类:   C01B031/04
  • 专利详细信息:   CN203639159-U 11 Jun 2014 C01B-031/04 201455 Pages: 8 Chinese
  • 申请详细信息:   CN203639159-U CN20849069 20 Dec 2013
  • 优先权号:   CN20849069

▎ 摘  要

NOVELTY - This utility new type claims a graphene thin film of one preparation device, comprise working cavity, the working cavity is set with carbon source entrance, residual gas exit the inner working cavity is set with a substrate, a screening electric field pole plate, first screening electric field electrode, second lower screening electric field electrode, accelerating a electric field polar plate, accelerating electric field pole plate, accelerating electric field electrode first, second accelerating electric field electrode, a heating plate move, first and second screening electric field electrode a and the electric field a screening plate connecting the first and second accelerating electric field electrode a. the two side residual gas exit of, first, second accelerating electric field electrode a and the accelerating electric field lower connecting plate, the substrate is placed in a heating plate move up, move a heating plate in accelerating electric field lower plate upper and lower accelerating a electric field polar plate and the accelerating electric field. This utility new type through a screening electric field, a valid the carbon ion and other anion separating, removing the graphite mass of other anion of interference.