• 专利标题:   Memory device used in electronic applications e.g. cell phone comprises substrate, first conductive layer, phase change layer over first conductive layer, selector layer between phase change and first conductive and second conductive layer.
  • 专利号:   US2021249597-A1, US11309490-B2
  • 发明人:   WU C
  • 专利权人:   TAIWAN SEMICONDUCTOR MFG CO LTD
  • 国际专利分类:   H01L027/24, H01L045/00
  • 专利详细信息:   US2021249597-A1 12 Aug 2021 H01L-045/00 202171 English
  • 申请详细信息:   US2021249597-A1 US785673 10 Feb 2020
  • 优先权号:   US785673

▎ 摘  要

NOVELTY - Memory device (21), comprises: a substrate (100); a first conductive layer (110) disposed over the substrate; a phase change layer (150) disposed over the first conductive layer; a selector layer (130) disposed between the phase change layer and the first conductive layer; and a second conductive layer disposed over the phase change layer, where at least one of the phase change layer and the selector layer has a narrow-middle profile. The first intermediate layer comprises tungsten, graphene, molybdenum disulfide, carbon, titanium, tantalum, tungsten nitride, titanium nitride and/or tantalum nitride. The heater comprises tungsten, titanium, tantalum, tungsten nitride, titanium nitride, and/or tantalum nitride. USE - The device is useful for electronic applications e.g. cell phones and personal computing devices. ADVANTAGE - The device: has several operating and engineering advantages including high speed, low power, non-volatility, high density, and low cost; is non-volatile and may be written into rapidly, e.g. within less than 50 nanoseconds; cells may have high density; and is compatible with complementary metal oxide semiconductor logic and can generally be produced at low cost compared to other types of memory cells. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for: (a) memory device; and (b) forming a memory device. DESCRIPTION OF DRAWING(S) - The figure shows cross-sectional view of the memory devices. Memory device (21) Substrate (100) First conductive layer (110) Selector layer (130) Phase change layer (150)