• 专利标题:   Graphene composite metal foil double-side growth device has chemical vapor deposition furnace comprising plasma glow region and heating growth region, and connected with unwinding shaft and winding shaft on both sides.
  • 专利号:   CN112746262-A, CN112746262-B
  • 发明人:   PENG H, CAO F, YANG H, WANG K, WANG X, LIU Z
  • 专利权人:   BEIJING GRAPHENE INST, UNIV PEKING
  • 国际专利分类:   C01B032/186, C23C016/26, C23C016/505, C23C016/54
  • 专利详细信息:   CN112746262-A 04 May 2021 C23C-016/26 202149 Pages: 13 Chinese
  • 申请详细信息:   CN112746262-A CN11035935 29 Oct 2019
  • 优先权号:   CN11035935

▎ 摘  要

NOVELTY - A graphene composite metal foil double-side growth device comprises chemical vapor deposition furnace (100) comprising plasma glow region (102) and heating growth region; an unwinding shaft and winding shaft are respectively set on the sides of the chemical vapor deposition furnace. The plasma glow region is provided with stent (103) comprising flat plate set with hollow area. The metal foil is flatly passed through the flat surface and suspended in the heating growth region (104); and the metal foil is double-faced to grow the graphene. USE - The graphene composite metal foil double-side growth device. ADVANTAGE - The growth temperature is low, has controllable vertical structure graphene structure and the total thickness, has wide metal type and material adaptability, and is suitable for industrialization. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for the graphene composite metal foil double-side growth method comprising providing metal foil, feeding into plasma glow region, entering into heating growth region, introducing carbon source gas, raising temperature, and performing plasma chemical vapor deposition reaction. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of graphene composite metal foil double-side growth device. Chemical vapor deposition furnace (100) Plasma glow region (102) Stent (103) Heating growth region (104) Unwinding reel (200)