• 专利标题:   Method for forming carbon based environmental sensor, involves forming control ring oscillator on semiconductor substrate, and protecting control ring oscillator from environment, where carbon device comprises carbon nanotubes or graphene.
  • 专利号:   US2016377566-A1, US9692397-B2
  • 发明人:   HAN S, JENKINS K A
  • 专利权人:   INT BUSINESS MACHINES CORP
  • 国际专利分类:   G01N027/04, H03K003/03, G01N027/414
  • 专利详细信息:   US2016377566-A1 29 Dec 2016 G01N-027/04 201705 Pages: 13 English
  • 申请详细信息:   US2016377566-A1 US753060 29 Jun 2015
  • 优先权号:   US753060

▎ 摘  要

NOVELTY - The method involves forming a ring oscillator (240) on a semiconductor substrate, where the ring oscillator comprises an AND gate (g1), an odd number of inverters (v1-v4) and a carbon device, and each carbon device is connected in series between the inverters. A control ring oscillator is formed on the semiconductor substrate. The control ring oscillator is protected from an environment, where the carbon device comprises carbon nanotubes or graphene, and the carbon device comprises a FET in which a channel of the FET comprises carbon. USE - Method for forming a carbon based environmental sensor. ADVANTAGE - The method enables operating as a voltage controlled oscillator, so that the voltage controlled oscillator is controlled by controlling gate voltage. The method enables changing conductance of the graphene or carbon nanotubes device, thus changing ring oscillator frequency and producing a convenient electrical signal when the analyte is present. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for the following: (1) a structure for forming a carbon based environmental sensor (2) a method for sensing an analyte in an environment. DESCRIPTION OF DRAWING(S) - The drawing shows a circuit diagram of a sensor. AND gate (g1) Resistors (r1-rn) Inverters (v1-v4) Sensor (200) Ring oscillator (240)