• 专利标题:   Robust graphene quantum Hall device, has substrate that comprises first insulating layer, two-dimensional electron gas and second insulating layer, and graphene layer which is formed over second insulating layer.
  • 专利号:   CN110061124-A, CN110061124-B
  • 发明人:   ZENG C, TAO R, LI L, YAN Y, ZHU L, GUO L, FAN X
  • 专利权人:   UNIV CHINA SCI TECHNOLOGY
  • 国际专利分类:   H01L043/06, H01L043/14
  • 专利详细信息:   CN110061124-A 26 Jul 2019 H01L-043/06 201973 Pages: 10 Chinese
  • 申请详细信息:   CN110061124-A CN10342506 25 Apr 2019
  • 优先权号:   CN10342506

▎ 摘  要

NOVELTY - The device has a substrate (10) that comprising a first insulating layer (11), a two-dimensional electron gas (12) and second insulating layer (13). The graphene layer (20) is formed over the second insulating layer, and an electrode (30) formed over the second insulating layer and in contact with the graphene layer. The effective thickness of the two-dimensional electron gas is less than 10nm. The two-dimensional electron gas is an oxide interface two-dimensional electron gas. The first insulating layer is barium titanate, and the second insulating layer is barium aluminate. The material of the electrode comprises titanium, palladium, and gold. The third insulating layer is made of hexagonal boron nitride. USE - Robust graphene quantum Hall device. ADVANTAGE - The device greatly improves the performance of the graphene device and enhances the robustness of the quantum Hall effect by using a preferred functional substrate material, and greatly reduce the production cost. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for preparing a robust graphene quantum Hall device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic structural diagram of a robust graphene quantum Hall device. Substrate (10) First insulating layer (11) Two-dimensional electron gas (12) Second insulating layer (13) Graphene layer (20) Electrode (30)