▎ 摘　　要

NOVELTY - Substrate - a X-cut-off of piezoelectric crystal, e.g., La3Ga5.5Ta0.5O14, with planes (110) parallel to the crystal surface is placed into a quartz reactor. The reactor is pumped out to 10-3-10-8 Torr and heated up to 900-1450 degrees C. The reactor then filled with carbon gases, e.g. acetylene, methane or ethylene, to achieve pressure of 10-10-1 Torr. After 15-100 min. the reactor is pumped out again to achieve pressure of 3.10-6 Torr while cooling it down to the room temperature. USE - Chemistry. ADVANTAGE - Process simplification, temperature reduction, production of uniform high-quality graphene films. 5 cl, 2 dwg, 3 ex