▎ 摘　　要

NOVELTY - The structure has a silicon nitride film layer (2), a graphene film layer (3) and a manganese sulfide film layer (4) connected with each other. The silicon film layer part is suspended, where the suspended part is provided with a micron-sized hole structure (5). The graphene thin film layer is arranged on an upper surface of the silica film layer to cover the micron hole structure, and a metal-sulfide (MS2) film layer, which is arranged above the graphene layer, and forms a heterojunction with the graphene film layers. The nano holes are provided between the graphene sheet layer and the MS2 sheet layer. USE - Graphene-molybdenum disulfide heterojunction nano-hole biological sensor structure for use in a biological single molecule sensor field based on two-dimensional material solid nanometre hole. ADVANTAGE - The graphene-MoS2 heterojunction nano-hole biological sensor structure has high spatial resolution, and realizes slowing of the through hole speed of the tested protein molecule under the premise of ensuring higher spatial resolution. The complexity of the device structure is not obviously increased, not introducing more noise, and the hole difficulty of tested molecule is not Obviously increased. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a preparation method of a graphene-MoS heterojunction nano-hole biological sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a Graphene-molybdenum disulfide heterojunction nano-hole biological sensor structure 1Silicon-based substrate 2Silicon nitride film layer 3Graphene film layer 4Mos2 film layer 5Micron-sized hole structure 6Nanometer hole