• 专利标题:   Method for manufacturing graphene device, involves forming substrate with electrode on growth of medium material.
  • 专利号:   CN105931966-A
  • 发明人:   FANG Y, GUO Y, LI J, YIN J, WANG B, ZHANG Z, LU W
  • 专利权人:   13TH RES INST CHINA ELECTRONIC SCI TEC
  • 国际专利分类:   H01L021/336
  • 专利详细信息:   CN105931966-A 07 Sep 2016 H01L-021/336 201668 Pages: 7 Chinese
  • 申请详细信息:   CN105931966-A CN10287852 04 May 2016
  • 优先权号:   CN10287852

▎ 摘  要

NOVELTY - The method involves forming upper electrode on substrate (1). The substrate with electrode is formed on the growth of medium material (5). The graphene (6) is grown to produce graphene device. The gate (4) of the electrode is embedded in the substrate. The medium material is grown in the gate. The substrate is made of Silicon carbide (SiC), Silicon dioxide (SiO2), Silicon (Si), sapphire, Boron nitride (BN), diamond, and glass. USE - Method for manufacturing graphene device. ADVANTAGE - The graphene device damage and pollution are avoided. The graphene device performance is improved. DESCRIPTION OF DRAWING(S) - The drawing shows a cross sectional view of the graphene device. Substrate (1) Source electrode (2) Gate (4) Medium material (5) Graphene (6)