▎ 摘　　要

NOVELTY - A graphene oxide-based vacuum sensor comprises reduced graphene oxide film, and electrodes that are arranged on the reduced graphene oxide film and are spaced apart from each other. USE - Graphene oxide-based vacuum sensor of vacuum test system (claimed) used for detecting vacuum degree in vacuum chamber. ADVANTAGE - The graphene oxide-based vacuum sensor has simple structure, high sensitivity and detection range of 105-10-1 Pa, and is processed conveniently at low cost. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: vacuum test system, which is provided with semiconductor characteristic analysis system connected to graphene oxide-based vacuum sensor; and #vacuum test method, which involves providing the vacuum test system in which the electrodes of the vacuum sensor are electrically connected to the probes of the semiconductor characteristic analysis system. The vacuum test system is placed in the to-be-tested vacuum chamber. The current variation of the vacuum sensor is measured by the semiconductor characteristic analysis system. The pressure inside the vacuum chamber is detected.