• 专利标题:   Preparation of graphene involves providing germanium substrate, spin coating on specific region of germanium substrate, heating and then continuously introducing argon gas, enhancing poly(methyl methacrylate) activity and decomposing.
  • 专利号:   CN108133885-A
  • 发明人:   XU A, WANG G, CHEN D, GUO Q, ZHANG N, LI J, XIANG P, YANG S, DING G
  • 专利权人:   UNIV NINGBO
  • 国际专利分类:   H01L021/285
  • 专利详细信息:   CN108133885-A 08 Jun 2018 H01L-021/285 201853 Pages: 7 Chinese
  • 申请详细信息:   CN108133885-A CN11086556 07 Nov 2017
  • 优先权号:   CN11086556

▎ 摘  要

NOVELTY - The preparation method of graphene involves providing germanium substrate, spin coating on specific region of germanium substrate to obtain poly(methyl methacrylate) thin film layer, placing in a tube furnace of plasma enhanced chemical vapor deposition apparatus and then heating at 4400-600 degrees C, continuously introducing argon gas into the furnace and then processing for 10-60 minutes, enhancing poly(methyl methacrylate) activity in poly(methyl methacrylate) thin film layer, processing for 10-60 minutes and then decomposing, forming graphene on surface of the germanium substrate and cooling to room temperature. USE - The method is useful for preparation of graphene. ADVANTAGE - The method enables economical preparation of graphene with excellent stability.