▎ 摘　　要

NOVELTY - Aluminum oxynitride ceramic heater comprises aluminum oxynitride (AlON), at least one additive selected from tin, tungsten carbide, carbon nanotubes, nitrogen boride, titanium dioxide, silicon dioxide, magnesium oxide, graphene, and rare earth metal oxides, a ceramic substrate and a resistance heating element comprising volume resistivity of 1.0E+10 to 1.0E+11 Omega cm at 650 degrees C and thermal conductivity at room temperature is 30 Watts per meter-Kelvin or more. The aluminum oxynitride (AlON) is prepared by reacting aluminum nitride (AlN) and aluminum oxide (Al2O3) in a molar ratio of 5-50:95-50. USE - Aluminum oxynitride ceramic heater used in infrared windows, lenses, sensor windows, laser equipment and transparent bulletproof material for semiconductor equipment, heat-resistant materials, transparent displays and optoelectronic devices. ADVANTAGE - The aluminum oxynitride ceramic heater has high plasma resistance, high volume resistance at high temperature, and excellent leakage current reduction performance. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method of manufacturing an aluminum oxynitride ceramic heater, which involves mixing aluminum oxynitride or a component, an additive, an alcohol compound, and a binder; drying the mixture prepared through the mixing to prepare a powder from which the alcohol component is removed; preparing a green body processed into a predetermined shape by compressing and molding the dried powder; removing the binder component by degreasing the prepared green body; preparing a ceramic substrate by sintering and polishing the degreased green body; and providing a resistance heating element inside or on the surface of the prepared ceramic substrate.