▎ 摘 要
NOVELTY - This utility new type provide a graphene pneuma sensitive a sensing element, comprising: a silicon substrate layer, a silicon oxide layer, a layer and graphene film is single layer, the silicon oxide layer on silicon substrate layer, the upper layer is a silicon oxide layer, the graphene film on the silicon oxide layer, and cover the electrode layer. This utility new type layer a silicon oxide layer on a silicon substrate layer, then a layer of a socket arrangement at a silicon oxide layer a, and a graphene film transfer, a graphene film cover a layer, because of specific characteristic of graphene, a one piece complete size of a graphene film comprises a certain difficulty, and the structure is dispersed using a socket, even if the graphene film is dispersed is, but because of a layer including the dense distribution of a socket, a double end electric connection of contact of a graphene film is still equal to the same one piece a graphene film, can reach the effect of checking, greatly reducing the graphene pneuma sensitive sensing element is a cost and processing difficulty.