• 专利标题:   Graphene gas-sensitive sensor, has silicon oxide layer located on silicon substrate layer, where upper layer of silicon oxide layer is fixed to graphene film and covered with electrode layer that is formed between two sockets.
  • 专利号:   CN204241405-U
  • 发明人:   GAO Z, HONG Z, HE W, LI J, LIN W, YANG Y, WANG B, ZHENG Z
  • 专利权人:   UNIV SHENZHEN
  • 国际专利分类:   G01N027/00
  • 专利详细信息:   CN204241405-U 01 Apr 2015 G01N-027/00 201539 Pages: 5 Chinese
  • 申请详细信息:   CN204241405-U CN20820822 19 Dec 2014
  • 优先权号:   CN20820822

▎ 摘  要

NOVELTY - This utility new type provide a graphene pneuma sensitive a sensing element, comprising: a silicon substrate layer, a silicon oxide layer, a layer and graphene film is single layer, the silicon oxide layer on silicon substrate layer, the upper layer is a silicon oxide layer, the graphene film on the silicon oxide layer, and cover the electrode layer. This utility new type layer a silicon oxide layer on a silicon substrate layer, then a layer of a socket arrangement at a silicon oxide layer a, and a graphene film transfer, a graphene film cover a layer, because of specific characteristic of graphene, a one piece complete size of a graphene film comprises a certain difficulty, and the structure is dispersed using a socket, even if the graphene film is dispersed is, but because of a layer including the dense distribution of a socket, a double end electric connection of contact of a graphene film is still equal to the same one piece a graphene film, can reach the effect of checking, greatly reducing the graphene pneuma sensitive sensing element is a cost and processing difficulty.