▎ 摘　　要

NOVELTY - Acetylene fluid supply package has a pressure vessel, a porous filler in the pressure vessel, an improved solvent within the porous filler, where solvent solubilizing with acetylene absorbed within the improved solvent, improved solvent is triethyl phosphate (TEP), TEP loaded into the pressure vessel in an amount no greater than about 0.64 kg of TEP per liter of volume of the pressure vessel. USE - Acetylene fluid supply package for use in fabricating a semiconductor device (claimed). ADVANTAGE - The acetylene fluid supply package has produced high purity films, improved solvents exhibit non-toxicity for acetylene fluid storage, dispensing and handling, and low vapor pressures to minimize solvent carryover during delivery of the acetylene fluid, while retaining suitable acetylene solubilizing capacity. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for: a system, which comprises an acetylene-utilizing process tool in fluid communication with the at least one acetylene fluid supply package, acetylene fluid supply package is configured to allow a discharge of the acetylene fluid under dispensing conditions; and further where acetylene-utilizing process tool is configured to receive the acetylene fluid from the at least one acetylene fluid supply package; and a method of fabricating a semiconductor device, which involves providing a semiconductor substrate and forming a carbon-containing layer on the semiconductor substrate using an acetylene fluid supply package, where the acetylene fluid supply package comprises a pressure vessel, a porous filler in the pressure vessel, and a solvent within the porous filler, solvent solubilizing with acetylene absorbed within the solvent, the vapor pressure of the solvent is 6 torr or less at 20 °C, the Hansen solubility factor (δh) of the solvent is 5 Mpa 0.5 or more, and the reproductive toxicity of the solvent is lower than that of dimethylformamide (DMF). DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of acetylene fluid supply packages. 14Outlet 16Shutoff valve 30Solvents 50Gas pipe 52First valve