• 专利标题:   Forming recrystallized metal layer for growing graphene monolayer involves forming metal layer on substrate; forming layer of dielectric material on the metal layer; and directionally recrystallizing the metal layer.
  • 专利号:   WO2012044284-A1, US2012286234-A1, US8492753-B2, JP2013538180-W, CN103124691-A, JP5762545-B2, CN103124691-B
  • 发明人:   YAGER T A
  • 专利权人:   EMPIRE TECHNOLOGY DEV LLC, ISLAND GIANT DEV LLP, EMPIRE TECHNOLOGY DEV LLC, ENPAL TECHNOLOGY DEV CO LTD
  • 国际专利分类:   C01B031/02, C03B029/00, C23C016/26, H01L021/20, H01L029/12, H01L021/00, H01L029/08, H01L035/24, H01L051/00, H01L051/40
  • 专利详细信息:   WO2012044284-A1 05 Apr 2012 C01B-031/02 201230 Pages: 39 English
  • 申请详细信息:   WO2012044284-A1 WOUS050566 28 Sep 2010
  • 优先权号:   CN80069270, JP530126, WOUS050566, US13129371, US13129371, CN80069270

▎ 摘  要

NOVELTY - A method of forming recrystallized metal layer for growing graphene monolayer involves: forming a metal layer on a substrate; forming a layer of dielectric material on the metal layer; and directionally recrystallizing the metal layer to form a recrystallized metal layer for growing a graphene monolayer, where the graphene monolayer has a length of greater than or equal to 15 microns. USE - For forming recrystallized metal layer for growing graphene monolayer (claimed). ADVANTAGE - The method forms recrystallized metal layer that form graphene monolayers having metal grains sizes that are larger than metal grains sizes of a metal layer that has not been subjected to directional recrystallization. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) a device comprising: a layer of dielectric material adjacent a substrate; and a directionally recrystallized metal layer adjacent the layer of dielectric material, where the directionally recrystallized metal layer comprises a metal layer for growing a graphene monolayer, where the graphene monolayer has a length of greater than or equal to 15 microns; and (2) a system comprising: at least one of the device configured to: form a metal layer on a substrate; form a dielectric layer on the metal layer; and directionally recrystallize the metal layer to form a metal layer for growing a graphene monolayer, where the graphene monolayer has a length of greater than or equal to 15 microns.