• 专利标题:   Graphene oxide quantum dot-based three-state charge-trapping memory, comprises oxide dielectric layer and palladium electrode film layer formed on silicon substrate.
  • 专利号:   CN107634067-A
  • 发明人:   XIAOBING Y, XINLEI G, HONG W, TAO Y
  • 专利权人:   UNIV HEBEI
  • 国际专利分类:   H01L027/11568, H01L029/51
  • 专利详细信息:   CN107634067-A 26 Jan 2018 H01L-027/11568 201813 Pages: 13 Chinese
  • 申请详细信息:   CN107634067-A CN10777066 01 Sep 2017
  • 优先权号:   CN10777066

▎ 摘  要

NOVELTY - A graphene oxide quantum dot-based three-state charge-trapping memory comprises oxide dielectric layer and palladium electrode film layer formed on a silicon substrate, where the oxide dielectric layer comprises silicon dioxide tunnel oxide layer, zinc oxide/graphene oxide quantum dots/zinc oxide charge trapping layer and silicon oxide blocking oxide layer which are sequentially formed on the silicon substrate, and the graphene oxide quantum dots layer in zinc oxide/graphene oxide quantum dots/zinc oxide charge trapping layer is single-layer graphene oxide quantum dot layer. USE - Graphene oxide quantum dot-based three-state charge-trapping memory. ADVANTAGE - The graphene oxide quantum dot-based three-state charge-trapping memory has stable capacitance value state, stable data retention properties, stable programming and erasing flat band voltage value, excellent storage performance, low operation voltage and current memory, high storage density and high stability. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for preparing a graphene oxide quantum dot-based three-state charge-trapping memory.