• 专利标题:   Preparing flexible strain sensor based on vertical graphite comprises adding flexible substrate fluorocrystalline mica sheet into magnetron sputtering apparatus, adding prepared interdigital electrode substrate, passing methane/hydrogen/argon mixed gas and excapsulating with polydimethylsiloxane.
  • 专利号:   CN114838653-A
  • 发明人:   ZHANG J, WANG J, ZHANG L, LUO K, WANG Q
  • 专利权人:   ZHENJIANG ELECTRONIC TUBE FACTORY, UNIV JIANGSU
  • 国际专利分类:   C23C014/16, C23C014/35, C23C016/26, G01B007/16
  • 专利详细信息:   CN114838653-A 02 Aug 2022 G01B-007/16 202296 Chinese
  • 申请详细信息:   CN114838653-A CN10428398 22 Apr 2022
  • 优先权号:   CN10428398

▎ 摘  要

NOVELTY - Preparing flexible strain sensor based on vertical graphite comprises (i) adding flexible substrate fluorocrystalline mica sheet into a magnetron sputtering apparatus, and using a copper target to sputter interdigital electrodes on the substrate; (ii) adding prepared interdigital electrode substrate into a tube furnace, feeding hydrogen/argon mixed gas, and annealing the interdigital electrode under normal pressure; (iii) adding flexible substrate on which the interdigitated electrodes are grown into the inductively coupled plasma chemical vapor deposition equipment, passing methane/hydrogen/argon mixed gas, and growing vertical graphene; and (iv) excapsulating with polydimethylsiloxane (PDMS). USE - The method is useful for preparing flexible strain sensor based on vertical graphite. ADVANTAGE - The method enables to prepare flexible strain sensor based on vertical graphite, which has good flexibility, reduces the damage of the structure caused by the vertical graphene in the transfer process so as to reduce the sensor performance, and avoids the damage to the environment caused by etching liquid used in transfer process or affect the health of human body. In addition, the copper interdigital electrode and vertical graphene are combined, improving the ohmic, contact can be used for improving the response performance of the flexible strain sensors. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for flexible strain sensor based on vertical graphite. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a sensor packaged with PDMS. 1Fluoride crystal mica sheet 2Interdigital electrode 3Vertical graphene 4Polydimethyl siloxane 5Lead