▎ 摘　　要

NOVELTY - The sensor has a lower electrode layer whose two sides are provided with an electric insulating layer. A lower layer of an electric insulating layer is provided with a sensor substrate. A lower layer of the sensor substrate is provided with an electric insulating layer. A lower layer of the electric insulating layer is provided with a sealing layer. A pressure-bearing membrane uses the graphene/hexagonal boron nitride/graphene (G/h-BN/G) vertical heterojunction film. The sensor substrate adopts micro-nano-array cavity structure such that the air pressure acts on the pressure-bearing membrane to generate local internal stress, where localized internal stress causes the change of G/h-BN/G film energy band structure, so that the tunnel current passing through G/h-BN/G heterojunction is changed to detect the air pressure. USE - High resolution graphene heterogeneity pressure sensor for use in an air pressure detecting device (claimed) in an aerospace. ADVANTAGE - The sensor utilizes the vertical heterojunction film of the graphene/hexagonal boron nitride/graphene as the bearing diaphragm, and the sensor substrate is provided with a micro-nano array cavity structure, so that the film can generate localized internal stress under the action of the air pressure, where localized internal stress changes the energy band structure of the vertical heterojunction film, and the tunnel current between the upper and lower layers of graphene reflects the change of external air pressure. The transmission of differential pressure sensor tunnel current is sensitive to the inner stress of the heterojunction so as to realize the detection of the sensor to the air pressure high resolution. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for an air pressure detecting device. The sealing layer is made of glass, metal, polymer or plastic. The electric insulating layer is made of silicon oxide, silicon nitride, aluminum oxide, zirconium oxide, zinc oxide, hexagonal boron nitride, mica, Polymethyl methacrylate (PMMA), Polyimide (PI) or Polyethylene naphthalate (PEN). The upper electrode layer and the lower electrode layer are made of metal, conductive ink or conductive polymer. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a core sensitive structure of a graphene-junction air pressure sensor. (Drawing includes non-English language text).