• 专利标题:   Fine patterning method for metal electrode of graphene capacitive touch screen, involves completing whole pattern of metal electrode, after removal of photo-sensitive resist from touch screen.
  • 专利号:   CN103064574-A
  • 发明人:   HUANG H, ZHAO B, CHEN K, LIU Z
  • 专利权人:   WUXI LIHE PHOTOELECTRIC SENSOR TECHNOLOG, WUXI LIHE PHOTOELECTRIC GRAPHENE APPL
  • 国际专利分类:   C23C028/00, G02F001/133, G06F003/044
  • 专利详细信息:   CN103064574-A 24 Apr 2013 G06F-003/044 201364 Pages: 15 Chinese
  • 申请详细信息:   CN103064574-A CN10012672 14 Jan 2013
  • 优先权号:   CN10012672

▎ 摘  要

NOVELTY - The method involves providing the substrate transferred with the graphene thin film, during metal film layer deposition. The photo-sensitive resist is used for protecting the window touch area of the touch screen. The whole pattern of the metal electrode is completed, after the removal of photo-sensitive resist from the touch screen. The metal film layer is deposited on the touch screen. USE - Metal electrode fine patterning method for graphene capacitive touch screen. ADVANTAGE - The low cost of the touch screen can be reduced. The etching speed of metal electrode layers and graphene layers can be increased. The yellow light fine-etching process can be avoided. The manufacture procedures can be simplified greatly. The product yield of the screen can be improved effectively. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the metal electrode. Window touch area of metal film layer (8) Lead electrode region of metal film layer (9)