• 专利标题:   Push-pull micro instrument for in-situ mechanical test of micro-nano material i.e. graphene, in nano-technology and micro-electronics industry, has lug boss arranged in middle portion of front side of moving area.
  • 专利号:   CN115683845-A
  • 发明人:   ZHANG J, SUI C, WANG C
  • 专利权人:   HARBIN INST TECHNOLOGY
  • 国际专利分类:   G01N003/02, G01N003/06, G01N003/08
  • 专利详细信息:   CN115683845-A 03 Feb 2023 G01N-003/08 202314 Chinese
  • 申请详细信息:   CN115683845-A CN11268663 17 Oct 2022
  • 优先权号:   CN11268663

▎ 摘  要

NOVELTY - The instrument has a first lug boss arranged in a middle portion of a front side of a moving area and located at an opening portion (15). A middle portion of a rear side of the moving area is formed with a groove. A middle portion of a rear groove side wall of a through groove (14) of a fixing area is provided with a second lug boss. The groove of the moving area is arranged with the second lug boss of the fixing area. A micro-nano sample is placed at a gap during in-situ stretching experiment. An end of the micro-nano sample is fixed on the fixing area. Another end of the micro-nano sample is fixed on the moving area. Four elastic elements are fixedly arranged in left and right spaces formed between the moving area and the through groove of the fixing area in a matrix form. USE - Push-pull micro instrument for in-situ mechanical test of a micro-nano material i.e. graphene, in a nano-technology and micro-electronics industry. ADVANTAGE - The instrument accurately measures a mechanical parameter of a material under a micro-nanometer scale, and can measure a load-displacement curve of a push-pull micro instrument main body and the sample in stretching process so as to calculate a sample rigidity value by curve slope change before and after sample failure, thus realizing Young modulus of the material under the micro-nanometer scale, tensile strength and mechanical parameters. The instrument can be easily integrated with a scanning electron microscope/transmission electron microscope (SEM/TEM), and reduces cost of a finished product and realizes accurate measurement of the mechanical parameters such as Young modulus and tensile strengths of the material. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of a push-pull micro instrument. 13Handle layer 14Through groove 15Opening portion