• 专利标题:   Plasma-enhanced chemical vapor deposition device useful for depositing graphene film on lithium battery aluminum foil electrode, has deposition chamber, hydrogen gas separation chamber and hydrogen storage chamber.
  • 专利号:   CN108998774-A
  • 发明人:   LI T, YANG H, YUAN Z, LI W, LI Y
  • 专利权人:   LI T
  • 国际专利分类:   C23C016/26, C23C016/50, C23C016/54
  • 专利详细信息:   CN108998774-A 14 Dec 2018 C23C-016/26 201918 Pages: 6 Chinese
  • 申请详细信息:   CN108998774-A CN10407779 06 Jun 2017
  • 优先权号:   CN10407779

▎ 摘  要

NOVELTY - A plasma-enhanced chemical vapor deposition device has a deposition chamber, a hydrogen gas separation chamber and a hydrogen storage chamber. The deposition chamber and hydrogen gas separation chamber are provided with a through hole, a vent pipe and a pressure gauge. The hydrogen gas separation chamber and hydrogen storage chamber are provided with a filter membrane and a hydrogen filter. One end of through hole is connected with an aeration pipe, hydrogen gas separation chamber and hydrogen storage chamber. The vent pipe is provided with a valve. The hydrogen storage chamber is provided with pressure gauge and connected with an air outlet pipe. The deposition chamber is provided with an aluminum foil rolling shaft, a rolling shaft and an extraction pipe that is provided with a vacuum pump and valve and connected with lower end of inlet pipe. The air outlet pipe is connected with valve and an exhaust chamber that is provided with an exhaust pipe and pressure gauge. USE - Plasma-enhanced chemical vapor deposition device is useful for depositing graphene film on lithium battery aluminum foil electrode capable of discharging hydrogen. DETAILED DESCRIPTION - A plasma-enhanced chemical vapor deposition device has a deposition chamber, a hydrogen gas separation chamber and a hydrogen storage chamber. The deposition chamber and hydrogen gas separation chamber are provided with a through hole, a vent pipe and a pressure gauge. The hydrogen gas separation chamber and hydrogen storage chamber are provided with a filter membrane and a hydrogen filter. One end of through hole is connected with an aeration pipe, hydrogen gas separation chamber and hydrogen storage chamber. The vent pipe is provided with a valve. The hydrogen storage chamber is provided with pressure gauge and connected with an air outlet pipe. The deposition chamber is provided with an aluminum foil rolling shaft, a rolling shaft and an extraction pipe that is provided with a vacuum pump and valve and connected with lower end of inlet pipe. The air outlet pipe is connected with valve and an exhaust chamber that is provided with an exhaust pipe and pressure gauge. The exhaust pipe is provided with vacuum pump and valve. The inlet pipe is provided with a vector flow meter, valve and outlet pipe. The vector flow meter and valve are connected with air inlet pipe through the valve. The hydrogen gas separation chamber is provided with a circulating air pipe that is provided with a blower, valve and vector flow meter and connected with air inlet pipe.