• 专利标题:   Manufacturing method of nitride single crystal, involves processing chemically the substrate using etchant to remove graphene layer.
  • 专利号:   KR2012029279-A
  • 发明人:   SEONG H K, SUNG Y J, CHUNG H J, HWANG S W, SONE C S
  • 专利权人:   SAMSUNG LED CO LTD
  • 国际专利分类:   C30B029/38, H01L021/20
  • 专利详细信息:   KR2012029279-A 26 Mar 2012 H01L-021/20 201232 Pages: 19
  • 申请详细信息:   KR2012029279-A KR091275 16 Sep 2010
  • 优先权号:   KR091275

▎ 摘  要

NOVELTY - The method involves preparing nitride monocrystal growth substrate. A graphene layer is formed on the substrate. A nitride single crystal layer is formed on the graphene layer. The substrate is chemically processed using etchant to remove the graphene layer. The etchant is selected from hydrofluoric acid, nitric acid, hydrochloric acid, sulfuric acid, phosphoric acid, acetic acid or acetone. The substrate is made of material selected from aluminum oxide, gallium nitride, silicon carbide or silicon. USE - Manufacturing method of nitride single crystal used in fabrication of nitride compound semiconductor luminance device (claimed). DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for method of fabricating nitride compound semiconductor luminance device. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view illustrating manufacturing process of nitride single crystal. (Drawing includes non-English language text)