• 专利标题:   Negative-capacitance FET for use in microelectronic field, has channel arranged in active layer, and gate arranged on the channel and insulated from channel by gate dielectric.
  • 专利号:   WO2022195226-A1, FR3120983-A1
  • 发明人:   RADU I, BESNARD G, CRISTOLOVEANU S
  • 专利权人:   SOITEC, SOITEC
  • 国际专利分类:   H01L021/762, H01L021/84, H01L027/12, H01L029/786, H01L021/02, H01L029/51, H01L029/772
  • 专利详细信息:   WO2022195226-A1 22 Sep 2022 H01L-021/762 202278 Pages: 27 French
  • 申请详细信息:   WO2022195226-A1 WOFR050479 17 Mar 2022
  • 优先权号:   FR002738

▎ 摘  要

NOVELTY - The FET has a semiconductor-on-insulator type substrate provided from a base towards a surface. A single ferroelectric layer (2) is arranged in direct contact with a semiconductor support substrate (1) and biased to form a negative capacitance. An active layer (3a) of a semiconductor material is adapted to form a channel of the transistor and arranged in direct contact with the ferroelectric layer. A channel (3b) is arranged in the active layer. A source (11) and a drain are arranged in the active layer. A gate is arranged on the channel and insulated from the channel by a gate dielectric. The support substrate is formed of silicon, germanium, silicon-germanium alloy, gallium arsenide, indium phosphide, gallium-indium arsenide, graphene or tungsten disulfide. USE - Negative-capacitance FET for use in a microelectronic field. ADVANTAGE - The FET allows better control of electric current in the active layer, faster switching of the transistor, and improved coupling with the gate on the rear face. The FET has a simple structure, and can be manufactured with existing processes. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for manufacturing a negative-capacitance FET. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a negative-capacitance FET. 1Semiconductor support substrate 2Single ferroelectric layer 3aActive layer 3bChannel 11Source