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  • 专利标题:   Manufacture of graphene film involves forming graphene on surface of metal catalyst, wet etching metal catalyst, forming pattern, dry etching, removing patterned metal catalyst, and transferring patterned graphene to target film.
  • 专利号:   KR2014057079-A, KR1815679-B1
  • 发明人:   YOON J H, NA D H, KIM S J
  • 专利权人:   SAMSUNG TECHWIN CO LTD, HANWHA TECHWIN CO LTD
  • 国际专利分类:   C01B031/02, H01L021/3065
  • 专利详细信息:   KR2014057079-A 12 May 2014 H01L-021/3065 201455 Pages: 14
  • 申请详细信息:   KR2014057079-A KR123743 02 Nov 2012
  • 优先权号:   KR123743

▎ 摘　　要

NOVELTY - Graphene is formed on the primary surface of metal catalyst, and wet etching of metal catalyst is carried out to form pattern. The patterned metal catalyst is subjected to dry etching and patterned metal catalyst is removed. The patterned graphene is transferred to the target film, to form graphene film. USE - Manufacture of graphene film (claimed).