▎ 摘　　要

NOVELTY - The nano template (10) includes a monolayer or a multi-layer structure. A surface of the graphene (SUR) includes a first pattern (PR1). A portion except the first pattern (PR2) has different chemical or physical properties. USE - Nano template for use on substrate e.g. glass, silicone, sapphire and plastic. ADVANTAGE - The restriction of substrate material selection is minimized. The economical efficiency of the process is excellent. The damage generation in the graphene is minimized by using the deep UV mode and the process time is shortened. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of the nano template. Nano template (10) Shaft direction (DR1,DR2,DR3) First pattern (PR1) Portion except first pattern (PR2) Surface of graphene (SUR)