• 专利标题:   Synthesis of graphene by carbon oxide-assisted chemical vapor deposition involves polishing and oxidizing substrate, placing substrate into chemical vapor deposition system, predetermining graphene, and recording nucleation density.
  • 专利号:   CN108163846-A
  • 发明人:   LIU Y, CHEN Y
  • 专利权人:   UNIV FUDAN
  • 国际专利分类:   C01B032/186, C01B032/188
  • 专利详细信息:   CN108163846-A 15 Jun 2018 C01B-032/186 201847 Pages: 7 Chinese
  • 申请详细信息:   CN108163846-A CN10055531 19 Jan 2018
  • 优先权号:   CN10055531

▎ 摘  要

NOVELTY - Synthesis of graphene by carbon oxide-assisted chemical vapor deposition comprises polishing and oxidizing substrate; placing substrate into chemical vapor deposition system; predetermining graphene, and recording nucleation density, nucleation condition and extension condition; and polishing substrate, oxidizing substrate, and placing substrate into chemical vapor deposition system comprising gas supply system, vacuum system, furnace chamber, heating system, and air supply system. The supply gas comprises carbon source gas, etching gas, current-carrying gas, and auxiliary gas. USE - Method for synthesizing graphene by carbon oxide-assisted chemical vapor deposition. ADVANTAGE - The method has good adaptability.