• 专利标题:   Formation method for graphene-based surface plasmon resonance sensor (SPR) involves patterning graphene into predetermined number of evenly spaced graphene strips.
  • 专利号:   US2015369735-A1, US9423345-B2
  • 发明人:   AVOURIS P, FARMER D B, LI Y, YAN H
  • 专利权人:   INT BUSINESS MACHINES CORP
  • 国际专利分类:   G01N021/552, H01L021/02, H01L021/04, H01L021/31, G01N021/75
  • 专利详细信息:   US2015369735-A1 24 Dec 2015 G01N-021/552 201604 English
  • 申请详细信息:   US2015369735-A1 US313456 24 Jun 2014
  • 优先权号:   US313456

▎ 摘  要

NOVELTY - The method involves depositing graphene (102) onto a substrate (104). The substrate includes a dielectric layer on a conductive layer (104a). The graphene is deposited onto a dielectric layer (104b). The graphene is patterned into a predetermined number of evenly spaced graphene strips. Each of the graphene strips has a width in range of 50 nanometers to 5 micrometers. The graphene strips are separated from one another by a distance in range of 5 nanometers to 50 micrometers. USE - Formation method for graphene-based SPR. ADVANTAGE - Allows for high plasmon field confinement and large plasmon propagation lengths due to the high carrier mobility and conductivity that are facilitated by the lattice structure of graphene. Eliminates the steps needed to pattern the graphene nanoribbons so as to simplify the process by using the use of bulk graphene. Lowers overall production costs due to the simplified process that is easier to implement. Allows for matching of the light wavevector and plasmon wavevector, and coupling of the incident light with the plasmon using periodic grating either via the patterned graphene nanoribbons or the regions of different dielectric permittivity. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for the following: (1) a method for forming the graphene-based SPR sensor; (2) a testing apparatus; and (3) a method for analyzing a sample using a graphene-based SPR sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional diagram of the starting structure for forming the graphene-based SPR sensor using graphene nanoribbons. Graphene (102) Substrate (104) Conductive layer (104a) Dielectric layer (104b)