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  • 专利标题:   Porous graphene thin film field emitting cathode, has cathode unit provided with cathode substrate that is matched with porous graphene thin film, where porous graphene thin film is connected with multi-hole array.
  • 专利号:   CN104134594-A, CN104134594-B
  • 发明人:   BAI B, DAI Q, HE F, LI Z, LI C, QIU X, YANG X
  • 专利权人:   NAT CENT NANOSCIENCE TECHNOLOGY CHINA, NAT CENT NANOSCIENCE TECHNOLOGY CHINA
  • 国际专利分类:   H01J001/304
  • 专利详细信息:   CN104134594-A 05 Nov 2014 H01J-001/304 201517 Pages: 8 Chinese
  • 申请详细信息:   CN104134594-A CN10373851 31 Jul 2014
  • 优先权号:   CN10373851

▎ 摘　　要

NOVELTY - The cathode has a cathode unit provided with a cathode substrate (40) that is matched with a porous graphene thin film (10). The porous graphene thin film is connected with a multi-hole array (30). The porous graphene thin film is matched with a continuous graphene thin film by plasma enhance chemical gas phase deposition process. The continuous graphene thin film is formed as a single-layer with multi-layer graphene. The multi-hole array is provided with a beam lithography and a UV lithography. The cathode substrate is made of silicon dioxide and aluminum oxide material. USE - Porous graphene thin film field emitting cathode. ADVANTAGE - The cathode is simple in structure, and increases edge ratio of the graphene thin film and electric current transmission capacity. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a porous graphene thin film field emitting cathode. Porous graphene thin film (10) Multi-hole array (30) Cathode substrate (40)